Highlights of the IVAM Product Market “Micro, Nano & Materials” at MicroTechnology/HANNOVER MESSE

New trends in miniaturized components and systems – high technologies from Japan and Korea and energy applications at the IVAM Product Market

New trends and applications from various high-tech areas will be presented again this year by the exhibitors of the Product Market “Micro, Nano & Materials” at MicroTechnology/HANNOVER MESSE from April 20 to 24, 2009 in Hanover, Germany. Organizer of the joint pavilion with 55 companies and institutes from all over the world is IVAM Microtechnology Network.

After the successful premier of the special show “Lasers for Micromachining and Microproduction” in 2008, laser technology will be in focus again at HANNOVER MESSE 2009. Additionally, IVAM will exhibit new subjects. The topic micro- and nanostructure technology will be presented for the first time under the roof of a Surface Pavilion. Also energy applications, among them the so-called energy harvesting for process and systems engineering, will be highlighted.

Korea, which is partner country of HANNOVER MESSE 2009, will be represented at the IVAM booth as well as Japanese companies and research institutions. Like in the previous years, IVAM again organizes the forum “Innovations for Industry“, whose single sessions will be dedicated to the different main subjects of the IVAM Product Market. The latter will include numerous product highlights, which are introduced in the following.

Intelligent RFID labels

The Fraunhofer Research Institution for Electronic Nano Systems ENAS will introduce an active, intelligent RFID label with the size of a smart card. It is the result of the joint BMBF project ASIL (partners: KSW Microtec, ELMOS Semiconductor AG, Schenker Deutschland AG, memsfab GmbH and Chemnitz University of Technology – ZfM) and could be used for transportation control of high-quality goods. The label measures temperature, inclination and shocks during the transportation. The innovation is the storage of the data for shock and inclination within one sensor system as well as the opportunity of its reading out via RFID. Another promising development of the Fraunhofer ENAS is a portable MEMS spectrometer for on-the-spot medical or forensic investigations.

Microsystems’ integration

Nowadays nothing works without highly integrated microelectronics and microsystems technology. Reliable and cost-effective assembly and interconnection technologies are the foundation of integrating these into products. Key topics of the Application Center at the Fraunhofer Institute for Reliability and Microintegration IZM Berlin are integration technologies for wireless automation, high-temperature interconnection and intelligent power electronics as well as micro energy technology and solutions for the preventive maintenance of microsystems. At the IVAM joint pavilion, sensor nodes and the exact readout of RFID will be presented.

iX-factory GmbH offers a broad spectrum of services based on microsystems. As a specialist in glass and silicon or a combination of both, the company uses various technologies such as dry etching, wet etching, multi-stack bonding, wafer bonding (anodic, eutectic), powderblasting, CVD and PVD deposition, and lithography. iX-factory’s services include project development, prototyping, product conception to (series) production, MEMS foundry services and second sourcing. The combination of integrated optics and microfluidics is the basis of iX-factory’s competence in the areas of (bio) sensors, labs-on-a-chip and micro reactors.

New production technologies

The Institute of Production Engineering of the Helmut-Schmidt-University operates in the research fields of micro manufacturing, robotics and production automation. The micro manufacturing activities focus on the development of the so-called Square Foot Manufacturing, an innovative concept for micro production. It uses several micro manufacturing units optimized for specific tasks instead of a single, complex ultra-precision machine tool. Because of the units’ small dimensions new technologies and materials can be used, which enable a higher accuracy. Furthermore economic and ecological advantages are expected.

The Fraunhofer Institute for Production Technology IPT develops prototypic components and systems for complex handling and assembly operations. At the MicroTechnology the institute will show solutions for the highly precise handling, adjustment and assembly of (micro-)optical components, even under special environmental conditions as clean room or vacuum. The Fraunhofer IPT will also present technologies for the manufacturing of optically fully functional surfaces for energy-efficient lighting systems: New process chains for mold making and mass replication allow the fabrication of highly complex micro structures on large areas of thermoplastic substrates. Optical elements of this material can be used for example for sensors, medical or display technology.

IMS BV offers turn-key and custom-made manufacturing solutions for the high-precision, electric and medical industry. Key aspects of these solutions are a modular system build-up and short lead times. An example of flexibility and modularity is the newly developed assembly platform ProBot. It facilitates the assembly of various components and parts in the micro range. The platform has flexible supply units, a minimal change-over time and a high re-usability rate. ProBot allows offline preparation for the assembly of new product types, so the change is done easily.

ECMTEC presents the electrochemical micromilling (ECF) technology. The ECF working machine offers new possibilities for industrial micromachining of metals and steel, which can be processed down to sub-microns. ECF can be used from rapid prototyping to serial production. It is already applied in the manufacturing of metallic micro-jet and micro-flow structures. Micro structures within micro moulds can also be refined efficiently with ECF. The technology “offers exciting possibilities in designing and manufacturing new micro instruments for micro surgical use”, states ECMTEC Marketing Director Markus Gaeckle.

Processing of diverse materials

The Fraunhofer Institute for Manufacturing Technology and Applied Materials Research IFAM shows the diversity of materials processable by micro injection molding and micro extrusion at HANNOVER MESSE. The techniques are suitable for a wide range of polymers, metals, ceramics and composites. Smallest functionalized parts with a complex shape are manufactured via these economic serial processes. The freedom of design and the flexibility of the materials open up application opportunities in nearly every industrial sector like medical technology, sensor technology, microfluidics, energy and environmental technology. Products with microstructured surfaces, which are needed for example in implant technology, can be processed by the micro injection molding of biocompatible materials.

Etchform BV offers various services, such as the production of thin metal precision parts by means of photo- and electrochemical precision etching, sample and mass production, additional surface and heat treatment, and precision mechanical as well as assembly services. The company solves technical problems of metal precision parts from standard as well as exotic materials, such as copper and stainless steel alloys, elgiloy/phynox, gold, invar/kovar, molybdenum, silver and titanium. This includes the fine line etching on flexible materials. Applications are, amongst others, casings, contact springs, cooling plates, connectors, electrode grids, filters, flow meters, position masks, shielding covers and sieves.

High-speed laser technology

Economic production processes require flexible laser tools with optimized beam geometry and intensity distribution. These beam properties are used for example during the cutting and welding of very small components. For this, so far, pulsed laser systems were mostly utilized. For many applications, however, a high peak-power per pulse is not necessary; the more so as this “erratic” welding procedure for example creates weld spatters. The new generation of high-power diode lasers of LIMO Lissotschenko Mikrooptik GmbH works unpulsed and therefore avoids this unintended side effect. With small spot sizes, very high intensities are achieved which allow high welding speeds in cw mode. Besides, the surface of the seams can often not be distinguished from the surface quality of the material.

The Fraunhofer Institute for Laser Technology ILT presents recent developments for high-precision laser manufacturing using new generations of laser sources. With ultra-fast pulsed lasers, micro injection molding tools can be manufactured with geometries in the micrometer range and sub-micron accuracies in conventional tool steels. This technology has been proven for rapid tooling in mass production of microfluidic and LED light guiding components. For the manufacturing of precision metallic components a new fiber laser based cutting technology is presented, which is able is cut complex parts within fractions of seconds, allowing a cost-effective production of small- and medium-sized lot sizes with a minimum of time to market.

Manufacturers of solar cells readily invest in fully automated state-of-the-art production lines to achieve a reduction of manufacturing costs and increase the efficiency in parallel. In such fabs, the utilization of lasers enables high efficiency and throughput at best attainable precision and minor damage to the cells. Staying abreast of these changes, 3D-Micromac AG advanced the approved microDRILL system. Utilizing an infrared laser, 5,000 clearance holes can be drilled per second. Their exact alignment at a repeat accuracy of 5 µm is achieved by edge and mark recognition. Drilled holes are machined free of cracks, at minimum heat affects and without debris.

Swiss Tec AG shows high-end micromachining equipment for cutting and drilling of intricate tubes used in medical device manufacturing, e.g. cardiovascular stents, specialty needles or guidewires. Proprietary CNC software runs the state-of-the-art fiber laser technology and an ultra-precise motion system. The machines are the fastest (3,000 mm/min cutting speed), most accurate laser micro cutting systems in their class. Individual work samples are provided free of charge to interested customers.

Lenses for laser material processing and high volume imprint equipment

JENOPTIK presents new developments of the JENar product family for laser material processing. In addition to proven products the company offers new variable 1x-4x beam expanders with quartz lenses as well as F-Theta JENar lenses for large scan field diameters of 170 mm. Two new F-Theta JENar lenses with a focal length of 170 mm for 532 nm and 1064 nm are made for a high imaging quality. On the other hand the compact JENar F-Theta lens for 1064 nm with a focal length of 160 mm and an equally large scan field diameter of 170 mm is a reasonable alternative. All these new products are designed without focussed back reflections in the galvo-mirror area. Because of highly laser-resistant glass materials the lenses are suitable for high-power applications without focus-shift effects.

Furthermore, JENOPTIK showcases its HEX 04 hot embossing/nano imprinting system. It provides the user with maximum flexibility in the high-precision molding of polymer parts which contain features in the micro and nano dimension including those with high aspect ratios. The HEX 04 system has been specifically created to provide a large volume manufacturing solution for a wide range of microoptical and microfluidical applications. It features short cycle times, the ability to emboss substrates up to 300 mm and uses JENOPTIK’s proprietary “Active De-Embossing Technology” which ensures an effective separation process of the embossing molds from the substrate.

Projection displays

The Fraunhofer Institute for Silicon Technology ISIT manufactures hermetically sealed 2D MEMS scanning mirrors for compact full-color laser projection displays and imaging sensor applications. Features of these electrostatically driven scanners are scan frequencies up to 100kHz, scan angles up to 100 degrees and low driving voltages. Hermetic vacuum encapsulation at wafer level makes the MEMS scanners suitable for automotive applications, as reliable operation over a wide temperature and humidity range is required. Among these applications there are dashboard displays, head-up displays and ranging sensors. However, the potentially largest market will be consumer applications like embedded laser projection displays for cell phones and game consoles.

Acceleration, angular rate and position sensors

In collaboration with Sensordynamics, Fraunhofer ISIT develops miniaturized, high-precision acceleration and angular rate sensors (gyrometers) with high device density and functionality. By chip-level integration of diverse sensor types and sensor axes, smart combi sensor systems can be manufactured cost-efficiently. The combination of three accelerometers and gyrometers to an inertial measurement unit (IMU) enables the real-time orientation and position tracking of a moving body. In a car these signals can be utilized for vehicle dynamic control systems like ESP. Autonomous position tracking can be used also for robotic navigation. Other applications are for example direction guidance in buildings or interactive interfaces for PCs for virtual reality animations.

CiS Forschungsinstitut für Mikrosensorik und Photovoltaik GmbH presents a modular construction kit for the fast and competitive development of opto-electronical horizontal position sensors. Essentials of the so-called eLiSe sensor platform are a precision circular bubble vial and a tailored reflectometric detector module, which scans the position of a gas bubble. The detector consists of a silicon chip with four photodiodes, arranged in a ring-shape, and an integrated LED die as light source. Evaluation electronics with standard interface I2C respectively USB plus visualization software are completing the eLiSe system, which is characterized by high sensitivity and resolution of measurement as well as its small size.

Measuring technology: more precise than ever

SIOS Meßtechnik GmbH, an expert for laserinterferometric precision measurement systems, presents its latest development: a vibrometer with integrated microscope for the vibrational analysis of micro objects. Furthermore a range of fiber-coupled interferometers and stabilized HeNe lasers will be shown. The triple-beam interferometer combines three interferometers into a single unit and thus is capable of making simultaneous, nanometer-precision, triaxial length measurements. The dynamic ranges for pitch and yaw measurements are approximately 2 arcmin with resolutions of 0.002 arcsec. A wide spectrum of applications is possible, including laserinterferometric measurements on guides, calibrating metrological equipment and machine tools, and high precision angle corrections during multiaxial length measurements.

Noptel Oy presents itself together with the Finnish technology center Micropolis Ltd. at the IVAM Product Market “Micro, Nano & Materials”. Noptel Oy specializes in the design and manufacture of applied optoelectronic devices for geometrical measurements, for example of distance, shape and position. Noptel's research has led to the design of laser range finder devices which determine, amongst others, the form of hot surfaces, dimensions of metal structures, vehicle speed and camera triggering.

Fries Research & Technology GmbH (FRT) presents innovative surface measuring solutions. The expert for high-precision optical 3D surface measuring systems shows the multisensor-capable optical profilometer MicroProf 200 and the confocal microscope MicroSpy Topo, which was awarded with the German Industry Prize 2008. Visitors are invited to bring along samples which can be measured by the FRT experts in high-res and 3D. Besides the systems that will be presented on the trade fair, FRT’s product offering also consists of automated surface metrology systems with robotic part handling, inline production control solutions and custom systems.

NanoFocus AG also presents 3D measurement methods for surface inspection in the quality assurance process. In particular, the confocal 3D measurement, for example with the microscope μsurf explorer, is adapted optimally for measuring topography and roughness in laboratories and the production process. With the μsurf explorer, NanoFocus offers a complete package including the software μsoft analysis for the first time. NanoFocus systems are already used for the monitoring of surfaces in the automotive, steel and printing industries.

Polytec GmbH shows its optical measurement instruments for the characterization of dynamic behaviour and static topography properties of micro systems. Ultra-high frequency measurements of mechanical vibrations up to several hundreds of MHz can be accomplished with the new UHF-120 Polytec Ultra High Frequency Vibrometer. For general 3D dynamic characterization and surface topography analysis of MEMS and MOEMS microstructures the Polytec MSA-500 Micro System Analyzer, an all-in-one measurement workstation for fast and reliable measurements, can be used. In addition to this product presentation within the IVAM booth Polytec will give a forum presentation entitled “Optical characterization of dynamic and topography properties of microsystems“.

Innovative controller concepts

Elliptec Resonant Actuator AG presents a multi-dimensional, backlash-free positioning unit based on the Elliptec piezo resonance motor X15G, offering high precision and dynamic in a compact design. It is displayed at Elliptec’s booth along with various customer applications. In addition, alternative control electronics for the Elliptec Motors X15G are presented. Finally, a prototype of a new piezo resonance motor will be demonstrated.

A small line, marking of wafers or coating of bio-sensors and stents – although the applications are different, the task is the same: printing lines and structures with small droplets. microdrop Technologies GmbH presents a new controller concept for its microdrop inkjet dispensers. The new controller allows the generation of small droplets out of large nozzles. Lines and structures out of nano inks, adhesives or other materials at sizes down to 35 μm and smaller can be printed this way.

Microfluidics “in action”

cetoni GmbH is an expert for laboratory devices in microfluidics and lab automation. Numerous innovations can be experienced “in action” at the company’s booth: The product range includes a modular syringe pump system for dosing fluid streams pulsation-free and in nanoliter precision, which is very important in microreaction technology as well as in chemical and biotechnological applications. For dosing fluids with pressures up to 250 bar cetoni developed a modular high-pressure syringe pump system, whereas for dosing particle or cell suspensions a special syringe stirring system can be used. It helps realizing a fluid stream with an optimized particle distribution in the liquid.

The new micropump mp6 from Bartels Mikrotechnik GmbH is the smallest serial produced piezoelectric diaphragm pump made from plastic on the market. The double actuator system reaches a maximum flow rate of 6 ml/min respectively a maximum back pressure of 550 mbar pumping water at a size of only 30 x 15 x 3,8 mm³. The powerful flow performance will be demonstrated to interested customers at the IVAM Product Market. “Visitors at the fair should convince themselves of the other benefits like the improved gas bubble tolerance and self-priming behaviour of the mp6”, advises product manager Severin Dahms, “Due to my present experience in customer-specific requirements, I can say that the mp6 offers the right solution for many applications in different branches”, adds Dahms.

Air filtration equipment for environmental and health protection

Many work processes cause hazardous substances, released in the form of dust, smoke or gases. These jeopardise the health of employees, the proper functioning of machines and the product quality. ULT AG‘s suction and filter units help to reduce the risks from harmful substances and to conform to legal requirements. With its new 300 series, ULT AG has developed a modular system that can specifically be configured and easily be supplemented or altered to meet changing needs.

Support for the micro and nano industry

The Micromachine Center (MMC) from Tokyo is a non-profit organization that supports the micro- and nano-related industry development. It launched an initiative named MEMS Industry Forum (MIF) for this purpose. MMC has been organizing the event MicroNano for years. The Exhibition Micromachine/MEMS is a main event of MicroNano 2009. More than fourteen thousand visitors and some four hundred exhibitors joined in 2008. Other events at MicroNano 2009 include MEMS the World, MEMS Forum, MEMS Packaging Symposium, BEANS & Integrated MEMS Seminar and a Germany-Japan Workshop. MIF, as hub of the MEMS technology and industry development in Japan, contributes to building up the competitiveness of the manufacturing industry through the commercialization of next-generation MEMS.

More information can be found at www.ivam.de/index.php?content=messe_details&id=357.