FRT GmbH is voted as "Equipment Supplier of the Year". The company with headquarters in Bergisch Gladbach, Germany, was honored with this title by 3D InCites on March 7th.
3D InCites was asking to vote among 40 nominees from 26 companies and 4 research institutes competing in 9 categories for this award. There were over 40,619 online votes, more than twice the number of last year’s event.
The MicroProf, third generation of surface metrology tools from FRT, combines multi-sensor technology and hybrid metrology in one measuring system and is a solution for metrology tasks in semiconductor and MEMS manufacturing.
It enables for a wide range of measurement tasks which can be carried out quickly, efficiently and intuitively. The MicroProf uses optical multi-sensor technology to measure the topography, the total thickness or the film thickness of samples without contact. Various optical measurement methods, which are usually only available as individual solutions, have been combined into an universal, space and cost saving tool.
Depending on the requirements, the MicroProf allows to perform quick overview measurements of the entire sample, as well as high-resolution detail measurements down to the sub-nm range. This is made possible by the individual combinations of the sensors. An intuitive to operate software allows for automated measurements and data evaluation, and enables to set up complex tasks quickly. On top fully automated sample handling and sorting is available.
Contact: Marco Cappelletti, FRT GmbH
cappelletti@frt-gmbh.com
